5-Axis Milled Ceramic Insulators for Semiconductor Equipment & Cleanrooms

Emhlabeni wezinga eliphezulu lokukhiqizwa kwe-semiconductor kanye nezindawo zezindlu ezihlanzekile, zonke izingxenye kufanele zilethe ukusebenza okungenasici. NgoPFT, singochwepheshe kwezobucikoI-5-axis milled ceramic insulatorslokho kuchaza kabusha ukunemba nokwethembeka. Nabangaphezu kuka-20+iminyaka yobungcweti, izixazululo zethu zakhiwe ukuze zihlangabezane nezidingo eziqondile zemishini ye-semiconductor, ukuqinisekisa ukuzinza okushisayo, ukugqunywa kukagesi, nokusebenza okungangcoliswanga kuzilungiselelo ezizwela kakhulu.

Kungani Kufanele Sikhethe Ama-5-Axis Milled Ceramic Insulators?

1.Amakhono Okukhiqiza Athuthukile

Indawo yethu ifakweimishini yokugaya ye-5-axis ye-CNC yesimanje, okuvumela ukunemba kwezinga le-micron ekubumbeni izitsha zobumba ezithuthukisiwe njenge-alumina (Al₂O₃), i-silicon carbide (SiC), ne-aluminium nitride (AlN). Ngokungafani nezindlela ezijwayelekile, ukwenziwa kwemishini ye-axis engu-5 kuvumela amajiyometri ayinkimbinkimbi—okubalulekile ezingxenyeni ezifana nezikhonkwane zokuphakamisa i-wafer, izingxenye zegumbi lokubeka, nezivikeli ezimelana ne-plasma.

Izici Eziyinhloko:

•Ukunemba:±0.005mm ukubekezelela ukuhlanganiswa okungenamthungo kumathuluzi e-ASML lithography noma amasistimu we-Lam Research etch.
•I-Material Versatility:Kwenzelwe i-alumina engu-99.8%, i-SiC ehlanzekile, nezinye izitsha zobumba ezithuthukisiwe.
•I-Surface Finish:I-Ra <0.2μm yokunciphisa ukukhiqizwa kwezinhlayiya kumagumbi okuhlanza e-ISO Class 1.

2.Ubunjiniyela Bezinqubo Zobunikazi

Onjiniyela bethu sebethuthukileizilawuli zenqubo ye-close-loopezijwayela ukuqina kwe-ceramic ngesikhathi somshini. Ngokuhlanganisa amasu okugaya okomile nokuncibilika kokudlidliza kwesikhathi sangempela, sifinyelela izindawo ezingenakho ukuqhekeka nempilo enwetshiwe yezingxenye—ngisho nangaphansi kokuhamba ngamabhayisikili ashisayo (kufika ku-1,600°C) .

I-Innovation Spotlight:

•Amaphrothokholi Wokusiza Ukucindezeleka:Nciphisa ama-micro-fractures kuma-insulators e-AlN ezinhlelweni ze-CVD.
•Ukwelashwa Kwangemva Komshini:I-HIP (Hot Isostatic Pressing) ithuthukisa ukuminyana kanye nokumelana nokugqwala.

3.Ukuqinisekisa Ikhwalithi Eqinile

Wonke ama-insulator ayangenaUkuhlolwa kwezigaba eziyi-12, okuhlanganisa:

•I-CMM (Coordinate Measuring Machine)ukuqinisekiswa kobukhulu obubucayi.
•Ukuhlolwa kokuvuza kwe-Heliumukuhambisana kwe-vacuum.
•I-EDS (Energy-Dispersive X-ray Spectroscopy)ukuze uqinisekise ubumsulwa bezinto ezibonakalayo.

EyethuIsistimu eqinisekisiwe ye-ISO 9001/14001iqinisekisa ukulandeleka kusuka ekuthengeni impahla eluhlaza (etholakala kubahlinzeki beSigaba 1 abafana ne-CoorsTek) kuya emaphaketheni okugcina.

Izicelo: Lapho Ukunemba Kuhlangana Nokusebenza

Ama-insulators ethu athenjwa ku:

•I-Etch & Deposition Tools:Izingxenye eziboshwe nge-SiC zokumelana ne-plasma kumamojula we-Applied Materials™.
•Izimila ze-Ion:Izikhonkwane zokuphakamisa i-Alumina ezinama-anti-static coatings ukuvimbela ukushelela kwe-wafer.
•I-Metrology Systems:Ama-insulators anezinga eliphansi le-thermal-expansion yezigaba ze-EUV lithography.

Ucwaningo lwesigameko:I-semiconductor ye-OEM ehamba phambili yehlise isikhathi sokuphumula samathuluzi ngo-40% ngemva kokushintshela kuma-showerheads aklanywe ngokwezifiso e-SiC, asebenze kahle kakhulu kunezingxenye zezimbangi ekucubunguleni i-wafer engu-300mm .

Ngale Kwezokukhiqiza: Indlela Yokubambisana

•I-Prototyping esheshayo:Thumela amafayela akho e-CAD futhi uthole ama-prototypes asebenzayo ezinsukwini ezingu-7.
•Ukupakishwa Kwegumbi Lokuhlanza Kusayithi:Ukuhlanganiswa kwegumbi elihlanzekile lekilasi le-10 lokuhlanganiswa okuqondile kwamathuluzi.
•Usekelo Lokusebenza Lokuphila Konke:Onjiniyela bethu bahlinzeka ngokuhlaziywa kokugqokwa kanye nezinsizakalo zokuphinda zenziwe kabusha ukuze banwebe imijikelezo yokuphila.